Temperature compensated optical pressure sensor
US4577100A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 27, 1983 |
| Grant date | Mar 18, 1986 |
| Priority date | — |
| Expiry date | Dec 27, 2003 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L11/025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An integrated optical pressure transducer having a diaphragm fabricated from a low-loss glass is positioned at the location where pressure changes are to be measured. An optical waveguide loop formed on one surface of the diaphragm acts as a ring cavity in which the difference between the resonating frequencies varies with pressure but not with temperature. Light energy is coupled into the waveguide loop from an optical source through a tangentially located input waveguide. An output waveguide, also tangentially located, couples light energy from the waveguide loop to a broadband detector so that the changes in frequency spectrum of the resonating frequencies within the waveguide loop can be monitored.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.