Arrangement and method for voltage measurement at a buried test subject

US4577147A · kind A · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Jürgen Frosien · Riemerling, DE
• Michael Pomper · Schliersee, DE

Key dates

• Filing date: Jun 6, 1983
• Grant date: Mar 18, 1986
• Expiry date: Jun 6, 2003

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/305
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

In order to permit good test results in the voltage measurement of buried test subjects, an arrangement is provided having a particle beam probe for voltage measurement at a test subject which is spatially separated from a surface by a solid state substance. The solid state substance provides mobile charges disposed in insulated fashion between said test subject and the particle beam probe. A charge separation due to the influence of the test subject potential is produced in the solid state substance so that a potential on the surface of the solid state substance immediately adjacent to the particle beam probe becomes proportional to the potential on the test subject.