Oil free vacuum system
US4577465A · kind A · utility
21Cited by
7References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 11, 1984 |
| Grant date | Mar 25, 1986 |
| Priority date | — |
| Expiry date | May 11, 2004 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S417/901
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
An oil free vacuum system 10 which comprises a high thermal capacitance cryopump 12 and air ejector 38. The air ejector 38 is used to reduce load lock chamber 16 pressure to an intermediate vacuum. Cryopump 12 further evacuates chamber 12 to the operating vacuum of a work chamber 14. The work chamber 14 is maintained at high vacuum by a main cryopump 20. The main cryopump can be started in an oil free manner through the use of air ejector 38 and high thermal capacitance cryopump 12. A high themal capacitance, high thermal conductance cryopanel is formed of a lead/copper sandwich.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.