Low power gas detector
US4580439A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Feb 7, 1984 |
| Grant date | Apr 8, 1986 |
| Priority date | — |
| Expiry date | Feb 7, 2004 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2217/49207
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gas detector includes a gas detecting element comprised of a metal oxide semiconductor material which changes its value of electrical resistance at an elevated temperature when it absorbs a gas. In one form, the gas detecting element is supported in the form of a bridge so as to increase its response speed by making thermal capacity as small as possible. In another form, the gas detecting element is supported in the form of a cantilever, more preferably in the form of a ring as formed along the periphery of a overhang portion of a disc-shaped layer of electrically insulating material. Also provided is a process for manufacturing a thin film of metal oxide, which may be advantageously used as a gas detecting element of a gas detector or a transparent electrode, for example, in a liquid crystal panel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.