Patent · US Expired

Components for evacuated equipment

US4580619A · kind A · utility

11Cited by
9References
20Claims
0Family size

Inventor

Key dates

Filing dateOct 13, 1981
Grant dateApr 8, 1986
Priority date
Expiry dateOct 13, 2001

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2237/2001
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

Evacuable equipment wherein for effective thermal transfer use is made of a thermally conductive fluid confined by a flexible diaphragm for heat transfer across the diaphragm between the fluid and a component forming part of or being treated in the equipment and situated under vacuum in thermal contact with the diaphragm, said diaphragm comprising a flexible gas-impermeable metal layer preventing uptake of gases by the fluid when the equipment is not under vacuum.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.