Radiation sensitive polymeric material

US4581401A · kind A · utility

Assignee

• Rohm Co., Ltd. · JP

Inventors

• Frithjof Asmussen · Berlin, DE
• Peter Quis · Darmstadt, DE
• Winfried Wunderlich · Roßdorf, DE
• Wolfram Schnabel · Idstein, DE
• Hideto Sotobayashi · Berlin, DE

Key dates

• Filing date: Sep 19, 1984
• Grant date: Apr 8, 1986
• Expiry date: Sep 19, 2004

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B29K2033/12
• WIPO field: Other special machines
• WIPO sector: Mechanical engineering

Abstract

A radiation sensitive polymeric material comprising a copolymer of methyl methacrylate and allyl methacrylate and at least one organosulfur compound having at least two --SH groups per molecule, said material being useful as a polymer resist sensitive to high energy radiation.