Variable axis rotary drive vacuum deposition system

US4583488A · kind A · utility

Assignee

• International Business Machines Corporation · US

Inventors

• William W. Brown · Los Altos, US
• Wayne Curry · Rochester, US
• Gerhard P. Dahlke · Buxtehude, DE
• Francis T. Lupul · Lagrangeville, US
• Paul A. Totta · Poughkeepsie, US

Key dates

• Filing date: Mar 23, 1984
• Grant date: Apr 22, 1986
• Expiry date: Mar 23, 2004

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67748
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Apparatus in a vacuum deposition system positions a workpiece holder in substantial alignment with a source of material to be deposited onto a work piece affixed to the workpiece holder. The apparatus also rotates the workpiece holder about the deposition source and linearly drives the workpiece holder to varying distances from the deposition source. The apparatus used to drive the workpiece holder is sealably mounted atop an opening in the vacuum chamber. The apparatus enables multiple source depositions to be carried out consecutively without accessing the vacuum chamber. By aligning the workpiece holder over the deposition source, nonuniform deposition onto the workpiece is substantially eliminated.