Method of manufacturing a device with micro-shutters and application of such a method to obtain a light modulating device
US4584056A · kind A · utility
22Cited by
4References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 13, 1984 |
| Grant date | Apr 22, 1986 |
| Priority date | — |
| Expiry date | Nov 13, 2004 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09F9/372
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method for manufacturing a device with micro-shutters, e.g., a light modulating device, includes the following steps: producing a first grid presenting cells; providing a plane support by depositing a layer of organic material on the grid filling the cells; producing a second grid on the layer of organic material; depositing a fine metallic layer on the second grid; cutting shutters and shutter attachments in the fine metallic layer; and removing the organic material layer in the cells to free the shutters.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.