Porous ceramic thin film and process for preparing the same
US4584280A · kind A · utility
49Cited by
11References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 11, 1984 |
| Grant date | Apr 22, 1986 |
| Priority date | — |
| Expiry date | May 11, 2004 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2218/11
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A process for preparing a porous ceramic thin film which comprises applying an anhydrous solution containing an organometallic compound and a multifunctional organic compound to a substrate, and thermally decomposing the compounds. The porous ceramic thin film prepared by the process has pores of not more than 10 .mu.m in pore size, and is useable as for materials of various sensors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.