Patent · US Expired

Flexible photosensitive polymer composition with azide and/or amine compound, poly(amic acid) and highly polar compound with boiling point above 150.degree. C.

US4587197A · kind A · utility

9Cited by
8References
14Claims
0Family size

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Inventors

Key dates

Filing dateFeb 8, 1984
Grant dateMay 6, 1986
Priority date
Expiry dateFeb 8, 2004

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S430/128
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A photosensitive polymer composition comprising (A) a poly(amic acid), (B) a compound or a mixture of compounds which can form a compound having two or more amino groups in the molecule, and (C) at least one compound having a boiling point of 150.degree. C. or higher at atmospheric pressure and selected from the group consisting of ##STR1## wherein R.sup.a, R.sup.b, R.sup.c, m and n are as defined in the specification, has good properties and does not produce cracks on a pattern at the time of development obtained from said composition.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.