Method for measuring current at a p-n junction
US4588946A · kind A · utility
4Cited by
0References
5Claims
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Assignee
Inventor
Key dates
| Filing date | Dec 30, 1983 |
| Grant date | May 13, 1986 |
| Priority date | — |
| Expiry date | Dec 30, 2003 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2653
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of mapping the current distribution of a p-n junction is described. The method uses measurements of the electron beam induced current.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.