Fused silica diaphragm module for high temperature pressure transducers
US4589286A · kind A · utility
17Cited by
4References
3Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 30, 1984 |
| Grant date | May 20, 1986 |
| Priority date | — |
| Expiry date | Mar 30, 2004 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0077
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A high temperature pressure transducer and sensing apparatus to determine the deflection of the transducer diaphragm is disclosed. The pressure transducer utilizes a fused silica diaphragm (12) which is illuminated at selected locations by a coherent laser source (52) via optical fibers (38, 46). The light reflected by the diaphragm (12) forms interference fringe patterns which are focused by gradient index rod lenses (36) on the ends of optical fibers (40, 48) for transmission to a fringe counting circuit (54). By digital techniques, the fringe count is converted into a determination of diaphragm deflection.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.