Method and apparatus for improving the sensitivity of a leak detector utilizing a cryopump
US4593530A · kind A · utility
14Cited by
10References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 10, 1984 |
| Grant date | Jun 10, 1986 |
| Priority date | — |
| Expiry date | Apr 10, 2004 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S417/901
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A cryopump and method for using cryopumping to enhance the sensitivity of a leak detection system. The cryopump is used to control the relative pumping speeds of the gases normally frozen out on the pump or adsorbed in a cold adsorbent to thereby achieve the enhanced sensitivity of the system. The system is characterized by controlled access to the cold panel which is disposed within the warm panel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.