Capacitive pressure detector
US4594639A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Feb 15, 1985 |
| Grant date | Jun 10, 1986 |
| Priority date | — |
| Expiry date | Feb 15, 2005 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0073
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive pressure detector, comprising a plate-shaped base (13), a stationary capacitor plate (14) disposed on the base (13), an aneroid capsule (6) arranged in connection with the base (13) and proviced with an area (8) with a mobile capacitor plate facing the stationary capacitor plate (14) and changing its distance from the stationary capacitor disc (14) by the effect of pressure. On the plate-shaped base (13), a silicon plate (5) is disposed, into which a membrane-like middle portion (8) functioning as the mobile capacitor plate has been worked. On the silicon plate (5), a preferably plate-shaped cover structure (12) is hermetically disposed so that a basin space (6) of the aneroid capsule is formed between the cover structure (12) and said middle portion (8). The membrane-like middle portion (8) of the silicon plate (5) is connected to the edge portion of the silicon plate (5) by means of a relatively thin-walled collar structure (11) extending from the edge of the middle portion (8) to the proximity of the inner face of the cover structure (12).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.