Method of producing thin-film transistor array
US4601097A · kind A · utility
40Cited by
5References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 29, 1984 |
| Grant date | Jul 22, 1986 |
| Priority date | — |
| Expiry date | Oct 29, 2004 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/481
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of manufacturing a thin film transistor array is simplified by processes to form source and drain electrodes at least of ITO film for pixel electrodes on a gate insulating film covering gate electrode and to form islands of an amorphous semiconductor film and a light shield film in the same masking process on the source and the drain electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.