Feedback-controlled workpiece positioning system
US4604562A · kind A · utility
5Cited by
12References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 29, 1982 |
| Grant date | Aug 5, 1986 |
| Priority date | — |
| Expiry date | Sep 29, 2002 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/45027
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
X-Y position measurement apparatus is employed with feedback controlled X-Y positioning apparatus for positioning a workpiece stage at a desired X-Y coordinate position in response to signals indicative of the actual position and the desired position of the workpiece stage. A normalization circuit is employed for gain correction of the signals indicative of the actual position of the workpiece stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.