Preparation of silane from methyldichlorosilane and chlorosilanes
US4605543A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 28, 1984 |
| Grant date | Aug 12, 1986 |
| Priority date | — |
| Expiry date | Sep 28, 2004 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B33/043
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
Silane, well adopted as a source of semiconductor/photovoltaic grade silicon, is facilely prepared from methyldichlorosilane and trichlorosilane and/or tetrachlorosilane by, (A) in a first step catalytically redistributing methyldichlorosilane with trichlorosilane or tetrachlorosilane, or admixture thereof, to form methyltrichlorosilane and dichlorosilane, and separating dichlorosilane from the resulting reaction medium, and (B) in a second step, catalytically disproportionating the dichlorosilane thus separated to form silane and trichlorosilane, and thence recovering silane thus formed and optionally recycling trichlorosilane to said step (A).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.