Broad bandwidth interferometric gauging system
US4606639A · kind A · utility
9Cited by
5References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 17, 1984 |
| Grant date | Aug 19, 1986 |
| Priority date | — |
| Expiry date | Dec 17, 2004 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/2416
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical gauging system comprises a fixture for rotating a workpiece to provide registration of the workpiece surfaces with a measurement optical path and optical interference apparatus for reflecting a measurement optical beam off said surfaces to provide an optical interference signal indicative of the distance between successive surfaces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.