Vacuum evaporation device
US4607152A · kind A · utility
Inventors
Key dates
| Filing date | Jul 26, 1984 |
| Grant date | Aug 19, 1986 |
| Priority date | — |
| Expiry date | Jul 26, 2004 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/24
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A vacuum evaporation device incorporates a main treatment enclosure connected to an auxiliary chamber containing a material evaporation cell. The cell is fixed to a tight bellows displacement member able to displace the cell between a first advanced position towards a main enclosure and a second retracted position. A sealing valve provided with a slide is provided for the main enclosure from the auxiliary chamber, whereby the material of the evaporation cell can thus be changed without placing the main enclosure under atmosphere again. A fixed heating tube, connecting the main enclosure to the auxiliary chamber, has a first end engaged in the main enclosure and a second end issuing into the auxiliary chamber. The second end is provided with an end piece made from a thermally insulating material ensuring mechanical continuity and thermal insulation with the support part and able to bearingly receive the evaporation cell when the latter is in the advanced position. The slide of the sealing valve is inserted between the end piece and the evaporation cell when the latter is in the retracted position, the travel of the cell between these end positions and consequently travel of the bell…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.