Sputtered films of metal alloy oxides and method of preparation thereof
US4610771A · kind A · utility
180Cited by
10References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 29, 1984 |
| Grant date | Sep 9, 1986 |
| Priority date | — |
| Expiry date | Oct 29, 2004 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2217/78
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A metal alloy oxide film and sputtering method for its production are disclosed, as well as a high transmittance, low emissivity coated product employing said metal alloy oxide film as an antireflective film in combination with a metallic film such as silver.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.