Method and apparatus for throttling gas flow to a cryopump
US4611467A · kind A · utility
11Cited by
2References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 10, 1985 |
| Grant date | Sep 16, 1986 |
| Priority date | — |
| Expiry date | Jun 10, 2005 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S417/901
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
Orifices in a cooled plate throttle gases entering a cryopump. Selected orifices are closed by removable closures such as spring clips to allow the throttling to be varied.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.