Evaporator crucible for vacuum depositing systems

US4613306A · kind A · utility

Assignee

• Leybold-Heraeus GmbH · DE

Inventors

• Volker Bauer · Neuberg, DE
• Albert Feuerstein · Neuberg, DE
• Horst Ranke · Alzenau, DE

Key dates

• Filing date: May 2, 1985
• Grant date: Sep 23, 1986
• Expiry date: May 2, 2005

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/30
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Evaporator crucible for vacuum depositing systems, having a crucible bottom with at least one bottom opening for the introduction of material in rod form for evaporation. At a distance from the bottom opening there is provided at least one metal crucible rim which preferably is provided with a coolant passage. To solve the problem of reducing the heat losses, the crucible rim is provided internally on at least a part of its depth with a lagging comprising ceramic material. This lagging preferably comprises individual ceramic building blocks which are preferably compressed from magnesium oxide.