Patent · US Expired

Method of starting and/or regenerating a cryopump and a cryopump therefor

US4614093A · kind A · utility

30Cited by

9References

17Claims

0Family size

Assignee

Leybold-Heraeus GmbH · DE

Inventors

Werner Bachler · Rösrath, DE
Hans-Joachim Forth · Neunburg vorm Wald, DE
Hans-Hermann Klein · Hürth, DE

Key dates

Filing date	Oct 18, 1985
Grant date	Sep 30, 1986
Priority date	—
Expiry date	Oct 18, 2005

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S417/901
WIPO fieldEngines, pumps, turbines
WIPO sectorMechanical engineering

Abstract

A cryopump has a two-stage refrigerator in a housing with a pumping surface area in thermal communication with each stage of the refrigerator for gas-pumping by adsorption or absorption when the refrigerator is operated. A roughing vacuum pump provides a pressure of from about 1 to about 10.sup.-3 mbar to the housing and at least the pumping surface area of the second refrigerator stage is heated sufficiently to prevent gas adsorption or absorption thereon before the cryopump is operatively connected to a space to be evacuated therewith as a starting method for improving the cryopumping of, particularly, helium and a regenerating method after use of the cryopump.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.