Particle-free dockable interface for integrated circuit processing
US4616683A · kind A · utility
48Cited by
10References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 8, 1985 |
| Grant date | Oct 14, 1986 |
| Priority date | — |
| Expiry date | Apr 8, 2005 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67775
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A particle-free dockable interface is disclosed for linking together two spaces each enclosing a clean air environment. The interface is composed of interlocking doors on each space which fit together to trap particles which have accumulated from the dirty ambient environment on the outer surfaces of the doors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.