Patent · US Expired

Method of preparing high purity white phosphorus

US4618345A · kind A · utility

5Cited by
1References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 17, 1984
Grant dateOct 21, 1986
Priority date—
Expiry dateFeb 17, 2004

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC01B25/02
  • WIPO fieldMaterials, metallurgy
  • WIPO sectorChemistry

Abstract

Liquid white phosphorus is distilled from red phosphorus in vacuo at 480.degree.-490.degree. C. The vapor is transferred in a conduit maintained at 250.degree. C. and condensed into liquid white phosphorus at room temperature. The liquid white phosphorus is then filtered to eliminate any condensed red phosphorus. The clear, colorless phosphorus produced may be utilized as a source of P.sub.4 species for chemical vapor deposition, sputtering, vacuum deposition, and molecular beam deposition of phosphorus, polyphosphide, and other phosphorus compound films for semiconductor and other applications including insulation and passivation.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.