Method of fabricating an imaging X-ray spectrometer

US4618380A · kind A · utility

Assignee

• The United States of America as represented by the Administrator of the National Aeronautics and Space Administration · US

Inventors

• George E. Alcorn · Fairfax, US
• Andre S. Burgess · Forestville, US

Key dates

• Filing date: Jun 18, 1985
• Grant date: Oct 21, 1986
• Expiry date: Jun 18, 2005

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P70/50
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A process for fabricating an X-ray spectrometer having imaging and energy resolution of X-ray sources. The spectrometer has an array of adjoining rectangularly shaped detector cells formed in a silicon body. The walls of the cells are created by laser drilling holes completely through the silicon body and diffusing n.sup.+ phosphorous doping material therethrough. A thermally migrated aluminum electrode is formed centrally through each of the cells.