Manufacture of integrated optical waveguides
US4619680A · kind A · utility
54Cited by
6References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 7, 1985 |
| Grant date | Oct 28, 1986 |
| Priority date | — |
| Expiry date | Jun 7, 2005 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C17/02
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Integrated optical waveguides, for example planar waveguides with stripes of guiding material formed integrally on a substrate, are manufactured by depositing the doped glass guiding material by plasma chemical vapor deposition. Several substrates can be arranged in a suitably shaped apparatus so that deposition can take place on all of them at once.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.