Rounded wall surface acoustic wave sensors
US4622854A · kind A · utility
22Cited by
2References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 31, 1984 |
| Grant date | Nov 18, 1986 |
| Priority date | — |
| Expiry date | Dec 31, 2004 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is an externally loaded pressure sensor using a pair of SAW devices formed on the wall of an interior cavity. The difference frequency of these devices is used as a temperature-compensated measure of hydrostatic pressure on the sensor exterior. The cavity wall immediately adjacent the long sides of at least one of the SAW devices is rounded, to improve pressure sensitivity without unacceptable increase in stresses or other adverse effects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.