Sensor with polycrystalline silicon resistors

US4622856A · kind A · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Josef Binder · Huntington, US
• David Cutter · Munich, DE
• Wolfgang Henning · Zorneding, DE
• Hans-Christian Schaber · Gräfelfing, DE
• Frank Möllmer · Bad Abbach, DE
• Hansjorg Reichert · Munich, DE

Key dates

• Filing date: May 25, 1984
• Grant date: Nov 18, 1986
• Expiry date: May 25, 2004

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49103
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Sensor with polycrystalline silicon resistors which are applied to a substrate and are covered with a dielectric passivating layer, characterized by the feature that the resistors are thermally adapted by targeted adjustment of their dopings and by suitable healing, and are balanced by laser trimming.