Method of making magnetic head sliders

US4624048A · kind A · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Holger Hinkel · Böblingen, DE
• Gerhard Kaus · Metzingen, DE
• Ulrich Kuenzel · Tübingen, DE
• Gerhard Schmid · Mindelheim, DE

Key dates

• Filing date: Aug 6, 1984
• Grant date: Nov 25, 1986
• Expiry date: Aug 6, 2004

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49044
• WIPO field: Audio-visual technology
• WIPO sector: Electrical engineering

Abstract

For making rails in workpieces for magnetic head sliders for sensors of magnetizable media, anodic oxidation of highly pure aluminum substrates is applied. For that purpose, the respective surface of the substrates is covered with a mask cover which leaves uncovered the zones in the substrate surface area which are intended for the forming of rails. By means of anodic oxidation of the aluminum in the exposed regions, rail layer regions of oxide are formed which after the removal of the mask cover can themselves be used as an etching mask in order to provide a recessed region between two respective rails by means of chemical wet etching.