Capacitive detector for absolute pressure
US4628403A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Feb 15, 1985 |
| Grant date | Dec 9, 1986 |
| Priority date | — |
| Expiry date | Feb 15, 2005 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0073
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive detector for absolute pressure, which comprises a base and a stationary capacitor plate (7) attached onto the base (3). An aneroid capsule (4) is arranged in connection with the base (3) and provided with a mobile capacitor plate area (5, 6) directed towards the base (3) and changing its distance from the stationary capacitor plate (7) by the effect of pressure. A silicon plate (2) is attached onto the base and has membrane-like middle portion (5, 6) acting as a mobile capacitor plate. A plate structure (1) is attached hermetically onto the silicon plate (2) such that the space of the aneroid capsule (4) is located between the plate structure (1) and the silicon plate (2).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.