Use of metallic glasses for fabrication of structures with submicron dimensions
US4630094A · kind A · utility
6Cited by
12References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 8, 1985 |
| Grant date | Dec 16, 1986 |
| Priority date | — |
| Expiry date | Mar 8, 2005 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S428/923
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Patterned structures of submicron dimension formed of supported or unsupported amorphous metals having submicron feature sizes characterized by etching behavior sufficient to allow delineation of sharp edges and smooth flat flanks, resistance to time-dependent dimensional changes caused by creep, flow, in-diffusion of unwanted impurities, out-diffusion of constituent atoms, void formation, grain growth or phase separation and resistance to phase transformations or compound formation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.