Ion pump
US4631002A · kind A · utility
19Cited by
2References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 22, 1983 |
| Grant date | Dec 23, 1986 |
| Priority date | — |
| Expiry date | Aug 22, 2003 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J41/20
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A sputter ion pump with a cathode having blades arranged radially adjacent the cylindrical hollow cells of the anode. This arrangement increases the probability of grazing collisions useful for the formation of fast inert gas molecules, particularly argon. This improves the pumping speed and the speed stability in time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.