X-ray generating apparatus
US4631743A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Sep 24, 1984 |
| Grant date | Dec 23, 1986 |
| Priority date | — |
| Expiry date | Sep 24, 2004 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H7/00
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An X-ray generating apparatus provided with at least one deflecting means disposed between a freely selected pair of adjacent deflecting electromagnets and adapted to undulate electrons around a design orbit. When the deflecting means if formed of variable horizontally or vertically deflecting electromagnets capable of forming a variable magnetic field for electron on the orbit, the electrons are undulated around the design orbit and synchrotron radiation or powerful wiggler radiation from a wiggler is generated to irradiate a large area of a given substrate. Thus, in the transfer of patterns for the production of LSI devices for example, the X-ray generating apparatus enables highly intensive X-rays abundantly containing soft X-rays to be emitted uniformly to irradiate a wide area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.