Patent · US Expired

Evaporator device for the evaporation of several materials

US4632059A · kind A · utility

17Cited by

8References

1Claims

0Family size

Assignee

DR. JOHANNES HEIDENHAIN GMBH · DE

Inventors

Georg Flatscher · Schneizlreuth, DE
Anton Beckerbauer · Nußdorf, DE

Key dates

Filing date	Sep 5, 1985
Grant date	Dec 30, 1986
Priority date	—
Expiry date	Sep 5, 2005

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3053
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

An evaporator device system having an electron jet heating device for the vaporization of several materials onto a substrate in a vacuum chamber includes at least two crucibles for the reception of respective evaporation materials. These crucibles are concentrically arranged on a turntable. For the more uniform evaporation of the material, at least the crucible aligned with the electron jet is caused to rotate in the turntable during operation of the eletron jet heating device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.