Multiple frequency laser interference microscope
US4632554A · kind A · utility
35Cited by
5References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 6, 1983 |
| Grant date | Dec 30, 1986 |
| Priority date | — |
| Expiry date | Dec 6, 2003 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A multiple frequency laser interference microscope in which a source of coherent laser light containing at least two frequencies of light is used in conjunction with a transmitted light polarizing microscope so as to provide an interference microscope. Using a wide fringe mode of operation refractive index becomes directly visible as shades and hues of different colors, and discontinuities and gradients of less than 0.001 may be detected. Using a narrow fringe mode of operation, measurement of fringe shift and thickness permit exact and rapid calculation of refractive index to 0.00n at least.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.