High efficiency direct detection of ions from resonance ionization of sputtered atoms
US4633084A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 16, 1985 |
| Grant date | Dec 30, 1986 |
| Priority date | — |
| Expiry date | Jan 16, 2005 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31749
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method and apparatus are provided for trace and other quantitative analysis with high efficiency of a component in a sample, with the analysis involving the removal by ion or other bombardment of a small quantity of ion and neutral atom groups from the sample, the conversion of selected neutral atom groups to photoions by laser initiated resonance ionization spectroscopy, the selective deflection of the photoions for separation from original ion group emanating from the sample, and the detection of the photoions as a measure of the quantity of the component. In some embodiments, the original ion group is accelerated prior to the RIS step for separation purposes. Noise and other interference are reduced by shielding the detector from primary and secondary ions and deflecting the photoions sufficiently to avoid the primary and secondary ions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.