Method for measuring low-frequency signal progressions with an electron probe inside integrated circuits
US4634972A · kind A · utility
5Cited by
2References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 20, 1984 |
| Grant date | Jan 6, 1987 |
| Priority date | — |
| Expiry date | Jul 20, 2004 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/305
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for measuring a low-frequency signal progression at a measuring point of a specimen by use of an electron probe. A load on the circuit is kept as low as possible by employing a pulsed electron probe during a search of the measuring points. The pulsed electron probe may also be employed for actual measurement. By providing a pulse repitition frequency of the electron probe which is independant of the operating frequency of the circuit specimen, a phase shift of the primary electron pulses relative to the low-frequency signal progression is not necessary for real time measurement of the low-frequency signal progression.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.