Vacuum gauge
US4636680A · kind A · utility
12Cited by
7References
44Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 24, 1983 |
| Grant date | Jan 13, 1987 |
| Priority date | — |
| Expiry date | May 24, 2003 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J41/04
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An ionization gauge of the type including a source of electrons, an accelerating electrode for accelerating said electrons through a volume generally defined by said accelerating electrode and a collector electrode, disposed in the volume. Ions are collected by the collector electrode. The accelerating electrode comprises a substantially closed anode having an internal cavity to precisely define the volume. An aperture is disposed to admit said electrons from the source into the closed volume.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.