Apparatus and method for reducing topographical effects in an auger image
US4638446A · kind A · utility
13Cited by
9References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 31, 1983 |
| Grant date | Jan 20, 1987 |
| Priority date | — |
| Expiry date | May 31, 2003 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/2276
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for producing an Auger image which is substantially independent of the topographical contour of the sample surface includes at least two counting means. Preferably, the two counting means are adapted to be dedicated counters, one for background incidents and one for signal incidents. The system also includes counter control means for regulating the counting time and the immersion incident energy threshold for each counter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.