Apparatus for positioning flat objects for microscopic examination
US4641930A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 15, 1983 |
| Grant date | Feb 10, 1987 |
| Priority date | — |
| Expiry date | Dec 15, 2003 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/26
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Apparatus is provided for guiding a pellicle-covered photomask or other flat object into viewing position for inspection upon a flat top plate of a stage below the objective of a microscope. The apparatus includes a pair of spaced parallel rails having inwardly extending upper and lower flanges that define opposed keyways in which keybars at the edges of a photomask-carrying paddle slide. To protect the pellicle membrane and to space the latter above the top stage top plate, at entrance ends of the rails, segments of the upper flanges are recessed greater than the width of the paddle to permit a vertical dropping movement of the leading end of paddle onto inlet horizontal guide surfaces. These guide surfaces are broad platforms on which may be deposited the leading end of the paddle. The recessed segments are spaced apart by a distance greater than the width of the paddle and as the leading end of the paddle is pushed forwardly, it engages inwardly inclined cam surfaces which cam the paddle to a centered position between the guide rails.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.