Patent · US Expired

Aberration measuring method

US4641962A · kind A · utility

15Cited by
4References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 19, 1983
Grant dateFeb 10, 1987
Priority date
Expiry dateMay 19, 2003

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01M11/0264
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

In aberration measurement, a light beam from a light source provided at the image plane position of a lens to be examined is caused to enter the lens to be examined, the light beam passed through the lens to be examined, is separated into a plurality of light rays in a plane perpendicular to a principal ray or in a plane perpendicular to the optical axis of the lens to be examined, and the position of each light beam is detected at a position which is spaced apart from a position optically conjugate with said image plane position with respect to the lens to be examined and at which the plurality of light rays can be separated from one another.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.