Field emission type electron microscope using a multi-stage acceleration tube
US4642461A · kind A · utility
4Cited by
5References
6Claims
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Key dates
| Filing date | Nov 29, 1984 |
| Grant date | Feb 10, 1987 |
| Priority date | — |
| Expiry date | Nov 29, 2004 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/073
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A field emission type electron microscope using a multi-stage acceleration tube wherein an acceleration voltage to be applied to at least one, always inclusive of a first-stage acceleration electrode, of acceleration electrodes is changed in interlocked relationship with a change in a field emission voltage to be applied to a field emission electrode, so that power of an electrostatic lens can be kept constant.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.