Method for forming conductive graphite film and film formed thereby
US4645713A · kind A · utility
34Cited by
4References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 27, 1986 |
| Grant date | Feb 24, 1987 |
| Priority date | — |
| Expiry date | Jan 27, 2006 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31678
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for forming a conductive graphite film comprises the steps of forming a carbon film on substrate material heated to 700.degree. C. or higher through a plasma discharge using hydrocarbon gas as raw material and subjecting the film to heat treatment at temperatures exceeding 1,500.degree. C.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.