Multi-coordinate measuring machine
US4647206A · kind A · utility
16Cited by
4References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 18, 1984 |
| Grant date | Mar 3, 1987 |
| Priority date | — |
| Expiry date | Sep 18, 2004 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/45
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention contemplates a multi-coordinate measuring machine with interferometric detection of the path of displacement in each of the measurement axes. Each measurement axis is provided with at least one interferometer head which consists of a beam splitter, reference mirror and photoelectric detector. The interferometer heads are supplied by a monomode fiber from a single stationary laser generator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.