Patent · US Expired

Vacuum depositing apparatus

US4648347A · kind A · utility

21Cited by

6References

6Claims

0Family size

Assignee

Leybold-Heraeus GmbH · DE

Inventors

Hans Aichert · Hanau, DE
Volker Bauer · Neuberg, DE
Albert Feuerstein · Neuberg, DE
Horst Ranke · Alzenau, DE

Key dates

Filing date	May 29, 1985
Grant date	Mar 10, 1987
Priority date	—
Expiry date	May 29, 2005

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/562
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

In vacuum depositing apparatus, especially for the manufacture of magnetic tapes, a substrate holder is disposed in the form of a cooling cylinder, and in the path of the vapor stream there is a mask for the purpose of geometrically restricting the vapor stream. In order to prevent any condensation of vaporized material in solid form, the surface of the mask facing the vapor stream is not aligned horizontally, and its lowermost edge lies within the projected surface of the crucible opening. The surface of the mask can be heated up to a temperature that is between the vaporizing temperature and the solidification temperature of the vaporized material. In an especially advantageous manner, the surface of the mask is formed by tiles of a ceramic material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.