Sensor
US4649363A · kind A · utility
4Cited by
5References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 22, 1985 |
| Grant date | Mar 10, 1987 |
| Priority date | — |
| Expiry date | Jul 22, 2005 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0618
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor having a silicon die having a central region and a flexible annular sensing portion surrounding the central region. The sensor has apparatus carried by the central region of the die for limiting the movement of the central region in each of two opposite directions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.