Charge coupled device for transferring electric charge
US4649407A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 6, 1985 |
| Grant date | Mar 10, 1987 |
| Priority date | — |
| Expiry date | Feb 6, 2005 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D44/474
Abstract
An insulating film O is formed on a semiconductor substrate S. On the insulating film O, first electrodes M.sub.1 are disposed in parallel and second electrodes M.sub.2 are also disposed in parallel. The first electrodes M.sub.1 are insulated from the second electrodes M.sub.2 and the first electrodes M.sub.1 and the second electrodes M.sub.2 are disposed such that one side of a first electrode M.sub.1 and one side of a second electrode M.sub.2 are adjacent to each other. On the surface regions of the semiconductor substrate S between the respective other sides of the first electrodes M.sub.1 and the second electrodes M.sub.2, high concentration regions S.sub.3 are formed using the first and second electrodes M.sub.1 and M.sub.2 as a mask without causing deviation in positioning. To the first electrodes M.sub.1 and the second electrodes M.sub.2, a first clock pulse .phi..sub.1 and a second clock pulse .phi..sub.2 are applied respectively and electric charges are transferred in response to these clock pulses.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.