System for measuring and detecting printed circuit wiring defects
US4650333A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 12, 1984 |
| Grant date | Mar 17, 1987 |
| Priority date | — |
| Expiry date | Apr 12, 2004 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2806
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A non-contact system for detecting printed circuit wiring defects and for measuring circuit feature height relative to a substrate. The system has an energy source for illuminating the substrate and circuit features and a scanner for both instantaneously receiving energy reflected from the substrate and circuit features and for generating a signal in response to the reflected energy, which signal is adapted to vary with the intensity of the reflected energy. An analyzer is connected to the scanner for correlating the generated signal to a measurement representative of the height of the circuit features relative to the substrate. Variations and non-uniformity of the substrate surface due to bending, warpage or other causes can be accounted for so as to provide an accurate measurement of the height of a circuit feature relative to the substrate surface on which it is mounted.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.