Alarm and control system for semiconductor factories or the like
US4651141A · kind A · utility
3Cited by
5References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 21, 1984 |
| Grant date | Mar 17, 1987 |
| Priority date | — |
| Expiry date | Feb 21, 2004 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG08B17/117
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
An alarm and control system for semiconductor factories or the like wherein poisonous and inflammable treatment gases such as silane gas are used as in the manufacturing process of semiconductors, etc. is disclosed. Gas detecting means are provided at locations where the treatment gases are used, the gas detecting means utilizing metal oxide semiconductors containing platinum black as a detecting element for detecting the leakage of the treatment gases.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.